Creating Interconnects Between Transistors Interconnects Fabrication requires: Lines make lateral Barrier to block connections within each Line copper diffusion layer; vias connect layers Via Liner to improve Barrier copper adhesion Chips have >50 miles of on Cu Seed layer for Line copper growth copper interconnect wiring Copper fill to com plete wire Resistance impacts power Barrier layers increase via resistance, cause and performance RC delays, waste power
New Ways to Wire and Integrate Chips Page 11 Page 13