Wiring Transistors On a Chip Interconnects Make connections laterally vertically and Lines + Vias Over 15 metal layers 4-5 layers at minimum pitch Smallest widths ~14nm Contacts Connect transistors to Via contacts interconnects Trench contacts One or two metal layers Gate Smallest widths ~12nm Fin Image source: TechInsights and Applied Materials
New Ways to Wire and Integrate Chips Page 9 Page 11