PPACtBenefit of Backside Power Distribution Network Inflection Frontside Scheme Backside Scheme Power delivery Power and Signal lines Reduced Maintain 10% signal lines only Voltage design margin Power rail Drop Power rail Transistor Power line Area 20 to 30% Savings cell area Power delivery reduction Key changes Separation of power and signal lines Power delivery from backside of the wafer Source: Adapted from multiple IMEC and ARM publications
New Ways to Wire and Integrate Chips Page 28 Page 30