PPACtBenefit of Backside Power Distribution Network Inflection Frontside Scheme Backside Scheme Power delivery Power and Signal lines Reduced Maintain 10% signal lines only Voltage design margin Power rail Drop Power rail Transistor Power line Area 20 to 30% Savings cell area Power delivery reduction Key changes  Separation of power and signal lines  Power delivery from backside of the wafer Source: Adapted from multiple IMEC and ARM publications

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