Announced Backside Power Distribution Network Approaches Buried Power Rail Power Via Backside Contact to S/D Power Backside Buried n-TSV via power rail contact Power delivery Area Scaling Good Better Best Process Complexity Low Medium High Source: Adapted from Song et al (IEDM, 2021) Source: Adapted from public company disclosures (2021) Source: Adapted from Song et al (IEDM, 2021) with subsequent analysis by Applied Materials with subsequent analysis by Applied Materials with subsequent analysis by Applied Materials