Hybrid Bonding for High-Density Chip-to-Chip Interconnects Hybrid bonding Approaches Wafer-to-wafer Die-to-wafer Dielectric materials and copper pads fuse 2 Enables >10,000 connections per mm Requires precision in processing and alignment SoC performance can be reconstituted and Multiple hybrid bonding options expanded with hybrid bonded chiplets SoC: System on a chip
New Ways to Wire and Integrate Chips Page 42 Page 44