End-to-End Portfolio of Hybrid Bonding Solutions Producer® CVD Producer® Etch Endura® Mustang® Reflexion® LK ™ Integrated Materials Solution for hybrid bonding Substrate Dielectric stack Damascene RDL / Barrier / seed PVD Copper pad fill CMP with tuned Surface Hybrid bond Anneal and finish CVD pad formation etch ECD dishing control preparation (D2W or W2W) bonding Collaborating with partners to develop end-to-end technologies to ramp hybrid bonding solutions Center of Excellence investigates materials and process interactions on custom test vehicles CVD: Chemical Vapor Deposition ECD: Electrochemical deposition RDL: Redistribution layer CMP: Chemical mechanical polishing PVD: Physical vapor deposition D2W: Die to wafer W2W: Wafer to wafer
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