Device Scaling Approaches Contribution to Logic Density Scaling Intrinsic Scaling DTCO Intrinsic Scaling DTCO N N N+1 N+1 >50% >40% 1% >25% 16nm 10nm 7nm 5nm 3nm Source: M. Liu/TSMC, ISSCC 2021 DTCO: Design Technology Co-Optimization DTCO is becoming an increasingly important contributor to scaling