Resistance Increases Exponentially as Wiring Scales Contact resistance Via resistance .) u a. ) ( . e u c a. an ( t e s c i >4x an >10x es t r s t i ac es t a r on i C V 10nm 7nm 5nm 3nm 10nm 7nm 5nm 3nm Node Node Assumptions: Dimensions scale; liner/barrier materials and dimensions do not a.u.: arbitrary units