End-to-End Portfolio of Hybrid Bonding Solutions Producer® CVD Producer® Etch Endura® Mustang® Reflexion® LK ™ Integrated Materials Solution for hybrid bonding Substrate Dielectric stack Damascene RDL / Barrier / seed PVD Copper pad fill CMP with tuned Surface Hybrid bond Anneal and finish CVD pad formation etch ECD dishing control preparation (D2W or W2W) bonding  Collaborating with partners to develop end-to-end technologies to ramp hybrid bonding solutions  Center of Excellence investigates materials and process interactions on custom test vehicles CVD: Chemical Vapor Deposition ECD: Electrochemical deposition RDL: Redistribution layer CMP: Chemical mechanical polishing PVD: Physical vapor deposition D2W: Die to wafer W2W: Wafer to wafer

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